0 part(s), total €0.00
Connection flange | DN 16 CF |
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Resolution | 0.1 µm |
Bakeout temperature with electric parts | 70 °C |
Bakeout temperature without electric parts | 200 °C |
Axial force | ≤ 45 N |
Fastening | Screws M4 x 5 (on actuator) |
Operating temperature | ≤ 65 °C |
Pressure range | 1E-9 hPa – 5E2 hPa over pressure |
Precision | 3 µm |
Stroke | 25 mm |
Maximum load torque at bellows | 0.2 N m |
Motor type | 2-ph stepping motor |
Service life | 10000 cycles |